Nonlocal electron kinetics in a low-pressure inductively coupled radio-frequency discharge
Kolobov, Vladimir I.
Beale, Daniel Frederick
Mahoney, Leonard J.
Wendt, Amy E.
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The following article appeared in Kolobov, V.I., Beale, D.F., Mahoney, L.J., & Wendt, A.E. (1994). Nonlocal Electron Kinetics In A Low Pressure Inductively Coupled Radio Frequency Discharge. Applied Physics Letters, 65(5), 537-9. and may be found at http://link.aip.org/link/?apl/65/537