Mechanisms for polycrystalline silicon defect passivation by hydrogenation in an electron cyclotron resonance plasma
Cielaszyk, Eric S.
Kirmse, Karen H.R.
Wendt, Amy E.
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The following article appeared in Cielaszyk, E.S., Kirmse, K.H.R., Stewart, R.A., & Wendt, A.E. (1995). Mechanisms For Polycrystalline Silicon Defect Passivation By Hydrogenation In An Electron Cyclotron Resonance Plasma. Applied Physics Letters, 67(21), 3099-101. and may be found at http://link.aip.org/link/?apl/67/3099