Measurements of electromagnetic fields in a planar radio-frequency inductively coupled plasma source
Wendt, Amy E.
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The following article appeared in Meyer, J.A., & Wendt, A.E. (1995). Measurements Of Electromagnetic Fields In A Planar Radio Frequency Inductively Coupled Plasma Source. Journal Of Applied Physics, 78(1), 90-6. and may be found at http://link.aip.org/link/?jap/78/90