X-rays in electron-cyclotron-resonance processing plasmas
Castagna, Timothy Joseph
Shohet, J. Leon
Denton, Denice D.
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The following article appeared in Castagna, T.J., Shohet, J.L., Denton, D.D., & Hershkowitz, N. (1992). X Rays In Electron Cyclotron Resonance Processing Plasmas. Applied Physics Letters, 60(23), 2856-8. and may be found at http://link.aip.org/link/?apl/60/2856