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Low-energy separation by implantation of oxygen structures via plasma source ion implantation

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Goeckner, Matthew J.; Turner, J.E.; Dallmann, Douglas Alan; Kruger, James B.; Shenai, Krishna; Speth, Robert R.; Booske, John H.; Rissman, Paul; Meyyappan, Nara; Lee, S.; Perez-Albuerne, Evelio A.; Zhang, L.; Shohet, J. Leon
The following article appeared in Zhang, L., Shohet, J.L., Dallmann, D., Booske, J.H., Speth, R.R., Shenai, K., et al. (1994). Low Energy Separation By Implantation Of Oxygen Structures Via Plasma Source Ion Implantation. Applied Physics Letters, 65(8), 962-4. and may be found at http://link.aip.org/link/?apl/65/962
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