Electron-density and energy distributions in a planar inductively coupled discharge
Mahoney, Leonard J.
Wendt, Amy E.
Richards, Carolyn J.
Shohet, J. Leon
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The following article appeared in Mahoney, L.J., Wendt, A.E., Barrios, E., Richards, C.J., & Shohet, J.L. (1994). Electron Density And Energy Distributions In A Planar Inductively Coupled Discharge. Journal Of Applied Physics, 76(4), 2041-7. and may be found at http://link.aip.org/link/?jap/76/2041