Beryllium window and acoustic delay line design for X-ray lithography beam lines at the University of Wisconsin Center for X-ray Lithography
Brodsky, Eric L.
Wells, Gregory M.
Corradini, Mike L.
Publ by American Inst of Physics, Woodbury, NY, USA
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The following article appeared in Brodsky, E.L., Hamilton, W., Wells, G., Cerrina, F., & Corradini, M. (1992). Beryllium Window And Acoustic Delay Line Design For X Ray Lithography Beam Lines At The University Of Wisconsin Center For X Ray Lithography. Review Of Scientific Instruments, 63(1 pt 2A), 749-. and may be found at http://link.aip.org/link/?rsi/63/749