Numerical-Simulation of Plasma Sheath Expansion, with Applications to Plasma-Source Ion-Implantation
Emmert, Gilbert A.
Henry, Michael Arthur
American Institute of Physics
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The following article appeared in Emmert, G.A., & Henry, M.A. (1992). Numerical Simulation Of Plasma Sheath Expansion, With Applications To Plasma Source Ion Implantation. Journal Of Applied Physics, 71(1), 113-117. and may be found at http://link.aip.org/link/?jap/71/113