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dc.contributor.authorKoch, Daniel J.en_US
dc.contributor.authorHitchon, William Nicholas Guyen_US
dc.date.accessioned2007-07-13T19:19:19Z
dc.date.available2007-07-13T19:19:19Z
dc.date.issued1991en_US
dc.identifier.citationThe following article appeared in Koch, D.J., & Hitchon, W.N.G. (1991). A Model Of A Dc Silane Discharge. Journal Of Applied Physics, 70(8), 4139-46. and may be found at http://link.aip.org/link/?jap/70/4139en_US
dc.identifier.urihttp://digital.library.wisc.edu/1793/9254
dc.descriptionThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.format.extent968600 bytes
dc.format.mimetypeapplication/pdfen_US
dc.format.mimetypeapplication/pdf
dc.relation.ispartofhttp://www.aip.orgen_US
dc.relation.ispartofhttp://jap.aip.orgen_US
dc.rightsCopyright 1991 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.en_US
dc.titleA model of a DC silane dischargeen_US
dc.identifier.doihttp://dx.doi.org/10.1063/1.349136en_US


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