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    Electron heating by sheaths in radio frequency discharges

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    file_1.pdf (1.149Mb)
    Date
    1992
    Author
    Wendt, Amy E.
    Hitchon, William Nicholas Guy
    Metadata
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    Permanent Link
    http://digital.library.wisc.edu/1793/9252
    Related Material/Data
    http://www.aip.org
    http://jap.aip.org
    DOI
    http://dx.doi.org/10.1063/1.350662
    Type
    Article
    Description
    This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
    Citation
    The following article appeared in Wendt, A.E., & Hitchon, W.N.G. (1992). Electron Heating By Sheaths In Radio Frequency Discharges. Journal Of Applied Physics, 71(10), 4718-26. and may be found at http://link.aip.org/link/?jap/71/4718
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    • College of Engineering Publications

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