Electromechanical devices utilising thin Si diaphragms
Lagally, Max G.
Miller, Jeffrey B.
Wiley, John D.
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The following article appeared in Guckel, H., Larsen, S., Lagally, M.G., Moore, G., Miller, J.B., & Wiley, J.D. (1977). Electromechanical Devices Utilising Thin Si Diaphragms. Applied Physics Letters, 31(9), 618-19. and may be found at http://link.aip.org/link/?apl/31/618