Electromechanical devices utilising thin Si diaphragms
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Date
1977Author
Guckel, Henry
Larsen, S.
Lagally, Max G.
Moore, George
Miller, Jeffrey B.
Wiley, John D.
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http://digital.library.wisc.edu/1793/9136Description
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Citation
The following article appeared in Guckel, H., Larsen, S., Lagally, M.G., Moore, G., Miller, J.B., & Wiley, J.D. (1977). Electromechanical Devices Utilising Thin Si Diaphragms. Applied Physics Letters, 31(9), 618-19. and may be found at http://link.aip.org/link/?apl/31/618