Determination of terrace size and edge roughness in vicinal Si{100} surfaces by surface-sensitive diffraction

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1987Author
Saloner, D.
Martin, Joe Allen
Tringides, Michael C.
Savage, Donald E.
Aumann, Christopher Eugene
Lagally, Max G.
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http://digital.library.wisc.edu/1793/9128Description
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Citation
The following article appeared in Saloner, D., Martin, J.A., Tringides, M.C., Savage, D.E., Aumann, C.E., & Lagally, M.G. (1987). Determination Of Terrace Size And Edge Roughness In Vicinal Si{100} Surfaces By Surface Sensitive Diffraction. Journal Of Applied Physics, 61(8), 2884-93. and may be found at http://link.aip.org/link/?jap/61/2884