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dc.contributor.authorPico, Carey Alanen_US
dc.contributor.authorLagally, Max G.en_US
dc.date.accessioned2007-07-13T19:18:21Z
dc.date.available2007-07-13T19:18:21Z
dc.date.issued1988en_US
dc.identifier.citationThe following article appeared in Pico, C.A., & Lagally, M.G. (1988). Kinetics Of Titanium Silicide Formation On Single Crystal Si:Experiment And Modeling. Journal Of Applied Physics, 64(10), 4957-67. and may be found at http://link.aip.org/link/?jap/64/4957en_US
dc.identifier.urihttp://digital.library.wisc.edu/1793/9126
dc.descriptionThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.format.extent2008623 bytes
dc.format.mimetypeapplication/pdfen_US
dc.format.mimetypeapplication/pdf
dc.relation.ispartofhttp://www.aip.orgen_US
dc.relation.ispartofhttp://jap.aip.orgen_US
dc.rightsCopyright 1988 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.en_US
dc.titleKinetics of titanium silicide formation on single-crystal Si:experiment and modelingen_US
dc.identifier.doihttp://dx.doi.org/10.1063/1.342445en_US


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