Kinetics of titanium silicide formation on single-crystal Si:experiment and modeling
Pico, Carey Alan
Lagally, Max G.
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The following article appeared in Pico, C.A., & Lagally, M.G. (1988). Kinetics Of Titanium Silicide Formation On Single Crystal Si:Experiment And Modeling. Journal Of Applied Physics, 64(10), 4957-67. and may be found at http://link.aip.org/link/?jap/64/4957