X-ray microdiffraction study of Cu interconnects

File(s)

file_1.pdf (223.9Kb)

Date

2000

Author

Zhang, Xueyuan

Solak, Harun H.

Cerrina, Francesco

Lai, Barry

Cai, Zhonghou

Ilinski, Peter

Legnini, Daniel G.

Rodrigues, William

Publisher

American Institute of Physics Inc

Metadata

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Permanent Link

http://digital.library.wisc.edu/1793/9082

Part of

College of Engineering Publications