Dense arrays of nanopores as x-ray lithography masks

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Date
2004Author
Knaack, Sara A.
Eddington, Janice
Leonard, Quinn
Cerrina, Francesco
Onellion, Marshall
Publisher
American Institute of Physics
Metadata
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http://digital.library.wisc.edu/1793/9074Description
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Citation
The following article appeared in Knaack, S.A., Eddington, J., Leonard, Q., Cerrina, F., & Onellion, M. (2004). Dense Arrays Of Nanopores As X Ray Lithography Masks. Applied Physics Letters, 84(17), 3388-90. and may be found at http://link.aip.org/link/?apl/84/3388