Microstructure sensors

File(s)
Date
1990Author
Guckel, Henry
Christenson, Todd R.
Skrobis, Kenneth J.
Sniegowski, Jeffrey J.
Kang, Joon-Won
Choi, Bumkyoo
Lovell, Edward G.
Publisher
Publ by IEEE, Piscataway, NJ, USA
Metadata
Show full item recordPermanent Link
http://digital.library.wisc.edu/1793/8860Related Material/Data
http://www.ieee.org/http://ieeexplore.ieee.org/xpl/conhome.jsp?punumber=1000245
Description
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Citation
Guckel, H., Christenson, T.R., Skrobis, K.J., Sniegowski, J.J., Kang, J.W., Choi, B., et al. (1990). Microstructure sensors. In 1990 International Electron Devices Meeting, Dec 9-12 1990, , 613-616.