Germanium hut nanostressors on freestanding thin silicon membranes
Evans, Paul G.
Tinberg, Daniel S.
Roberts, Michelle M.
Lagally, Max G.
American Institute of Physics
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The following article appeared in Evans, P.G., Tinberg, D.S., Roberts, M.M., Lagally, M.G., Xiao, Y., Lai, B., et al. (2005). Germanium Hut Nanostressors On Freestanding Thin Silicon Membranes. Applied Physics Letters, 87(7), 73112-1. and may be found at http://link.aip.org/link/?apl/87/73112