Diagnostics for plasma processing (etching plasmas)
Breun, Robert A.
American Institute of Physics
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The following article appeared in Hershkowitz, N., & Breun, R.A. (1997). Diagnostics For Plasma Processing (Etching Plasmas). Review Of Scientific Instruments, 68(1), 880-5. and may be found at http://link.aip.org/link/?rsi/68/880