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dc.contributor.authorHershkowitz, Noahen_US
dc.date.accessioned2007-07-13T19:15:02Z
dc.date.available2007-07-13T19:15:02Z
dc.date.issued1998en_US
dc.identifier.citationHershkowitz, N. (1998). Role Of Plasma Aided Manufacturing In Semiconductor Fabrication. Ieee Transactions On Plasma Science, 26(6), 1610-1620.en_US
dc.identifier.urihttp://digital.library.wisc.edu/1793/8692
dc.descriptionThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.format.extent719086 bytes
dc.format.mimetypeapplication/pdfen_US
dc.format.mimetypeapplication/pdf
dc.publisherIEEE, Piscataway, NJ, USAen_US
dc.relation.ispartofhttp://www.ieee.org/en_US
dc.relation.ispartofhttp://ieeexplore.ieee.org/servlet/opac?punumber=27en_US
dc.rightsCopyright 1998 Institute of Electrical and Electronics Engineersen_US
dc.rights©20xx IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.en_US
dc.titleRole of plasma-aided manufacturing in semiconductor fabricationen_US
dc.identifier.doihttp://dx.doi.org/10.1109/27.747878en_US


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