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dc.contributor.authorSarfaty, Mosheen_US
dc.contributor.authorHarper, Michaelen_US
dc.contributor.authorHershkowitz, Noahen_US
dc.date.accessioned2007-07-13T19:15:01Z
dc.date.available2007-07-13T19:15:01Z
dc.date.issued1998en_US
dc.identifier.citationThe following article appeared in Sarfaty, M., Harper, A.M., & Hershkowitz, N. (1998). A Novel Electro Optical Probe To Diagnose Plasma Uniformity. Review Of Scientific Instruments, 69(9), 3176-80. and may be found at http://link.aip.org/link/?rsi/69/3176en_US
dc.identifier.urihttp://digital.library.wisc.edu/1793/8690
dc.descriptionThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.format.extent193368 bytes
dc.format.mimetypeapplication/pdfen_US
dc.format.mimetypeapplication/pdf
dc.publisherAmerican Institute of Physicsen_US
dc.relation.ispartofhttp://www.aip.orgen_US
dc.relation.ispartofhttp://rsi.aip.orgen_US
dc.rightsCopyright 1998 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.en_US
dc.titleA novel electro-optical probe to diagnose plasma uniformityen_US
dc.identifier.doihttp://dx.doi.org/10.1063/1.1149080en_US


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