A novel electro-optical probe to diagnose plasma uniformity
American Institute of Physics
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The following article appeared in Sarfaty, M., Harper, A.M., & Hershkowitz, N. (1998). A Novel Electro Optical Probe To Diagnose Plasma Uniformity. Review Of Scientific Instruments, 69(9), 3176-80. and may be found at http://link.aip.org/link/?rsi/69/3176