Browsing MINDS@UW Madison by Author "Nauka, Krysztof"
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Deposited charge measurements on silicon wafers after plasma treatment
Shohet, J. Leon; Nauka, Krysztof; Rissman, Paul (IEEE, Piscataway, NJ, USA, 1996) -
Relationship between the charging damage of test structures and the deposited charge on unpatterned wafers exposed to an electron cyclotron resonance plasma
Cismaru, Cristian; Shohet, J. Leon; Nauka, Krysztof; Friedmann, James B. (American Institute of Physics, 1998)