Browsing MINDS@UW Madison by Author "Abdo, Amr Y."
Now showing items 1-1 of 1
-
Modeling of the Thermal Response and the Thermal Distortion of Optical Mask during Optical Lithography Exposure Process
Abdo, Amr Y. (University of Wisconsin-Madison, 1999)Optical lithography is the only commercial method for producing integrated circuits chips in 1999, but it may be replaced by other technologies due to its minimum feature size limit. The demand of faster integrated ...