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Towards CNC automation in AFM probe-based nano machining

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Author(s)
Brousseau, Emmanuel; Arnal, Benoit; Thiery, Stephane; Nyiri, Eric; Gibaru, Olivier; Mayor, J. Rhett
Publisher
8th International Conference on MicroManufacturing (ICOMM 2013)
Citation
ICOMM 2013 No. 95
Date
Mar 25, 2013
Subject(s)
nanomanufacturing; automation; CAD/CAM; AFM probe-based machining
Abstract
This paper presents a feasibility study, which aims to demonstrate the applicability of the CNC automation philosophy for the process of AFM probe-based nano machining conducted on commercial AFM instruments. In particular, it is proposed to machine in this way nanostructures generated with any CAD software via the representation of tip path trajectories with G-code instructions. Such a representation can then be interpreted with a post processor at the interface of an AFM instrument. To demonstrate the validity of the proposed approach, it was implemented on a complex pattern. The results obtained open further research perspectives with respect to minimizing the sources of machining errors observed.
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http://digital.library.wisc.edu/1793/65292 
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