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    • Micromachining Characterization of Ultrathin Ni-membranes 

      Mahawar, Vijay; Singh, Kundan Kumar; Singh, Ramesh (9th International Conference on MicroManufacturing (ICOMM 2014), 2014-03-25)
      Thin membranes of different materials find extensive use in fabrication of Micro Electro Mechanical Systems (MEMS) devices.Machined membranes are used as heat sinks by fabricating micro channels for high heat transfer rates ...