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dc.contributor.advisorOlson, Johnen_US
dc.contributor.authorBarthen, Michael L.en_US
dc.date.accessioned2010-04-28T21:33:14Z
dc.date.available2010-04-28T21:33:14Z
dc.date.issued2001en_US
dc.identifier.urihttp://digital.library.wisc.edu/1793/39819
dc.descriptionPlan Ben_US
dc.description.abstractCompany XYZ is a company that processes semiconductor wafers. In their process, AZ® P4620 photoresist, an organic compound, is removed by Shipley Microposit Remover 1165, an organic solvent. When this occurs they produce a waste that cannot be disposed into a city’s water system. An analysis was conducted to determine the methods that could be used to treat the waste, recover the solvent and eliminate the use of organic solvents for photoresist stripping. Also the main components of Shipley Microposit Remover 1165 and AZ® P4620 Photoresist were analyzed for different health effects they might attribute for.
dc.publisherUniversity of Wisconsin--Stout
dc.subject.lcshSemiconductor wafersen_US
dc.subject.lcshSemiconductor industry--Waste disposalen_US
dc.titleAnalysis of Shipley Microposit Remover 1165 and AZ P4620 Photoresist waste disposal for Company XYZen_US
dc.typeThesis
thesis.degree.levelM.S.en_US
thesis.degree.disciplineRisk Control


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  • UW-Stout Masters Thesis Collection - Plan B
    This collection holds UW-Stout Masters Theses within the Plan B format. Theses pre-1999 are located on microfilm and will need to be requested from the archives. Contact archives@uwstout.edu for access.

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