Analysis of Shipley Microposit Remover 1165 and AZ P4620 Photoresist waste disposal for Company XYZ

Abstract

Company XYZ is a company that processes semiconductor wafers. In their process, AZ® P4620 photoresist, an organic compound, is removed by Shipley Microposit Remover 1165, an organic solvent. When this occurs they produce a waste that cannot be disposed into a city’s water system. An analysis was conducted to determine the methods that could be used to treat the waste, recover the solvent and eliminate the use of organic solvents for photoresist stripping. Also the main components of Shipley Microposit Remover 1165 and AZ® P4620 Photoresist were analyzed for different health effects they might attribute for.