Analysis of Shipley Microposit Remover 1165 and AZ P4620 Photoresist waste disposal for Company XYZ

File(s)
Date
2001Author
Barthen, Michael L.
Publisher
University of Wisconsin--Stout
Department
Risk Control
Advisor(s)
Olson, John
Metadata
Show full item recordAbstract
Company XYZ is a company that processes semiconductor wafers. In their process, AZ® P4620 photoresist, an organic compound, is removed by Shipley Microposit Remover 1165, an organic solvent. When this occurs they produce a waste that cannot be disposed into a city’s water system. An analysis was conducted to determine the methods that could be used to treat the waste, recover the solvent and eliminate the use of organic solvents for photoresist stripping. Also the main components of Shipley Microposit Remover 1165 and AZ® P4620 Photoresist were analyzed for different health effects they might attribute for.
Permanent Link
http://digital.library.wisc.edu/1793/39819Type
Thesis
Description
Plan B