Measurement of Ion Species Ratio in the Plasma Source Ion-Implantation Process
Fetherston, R. Paul
Breun, Robert A.
Conrad, John R.
American Institute of Physics
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The following article appeared in Tang, B.Y., Fetherston, R.P., Shamim, M., Breun, R.A., Chen, A., & Conrad, J.R. (1993). Measurement Of Ion Species Ratio In The Plasma Source Ion Implantation Process. Journal Of Applied Physics, 73(9), 4176-4180. and may be found at http://link.aip.org/link/?jap/73/4176