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    Distribution of Incident Ions and Retained Dose Analysis for a Wedge-Shaped Target in Plasma Source Ion-Implantation

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    file_1.pdf (886.4Kb)
    Date
    1995
    Author
    Malik, Shamim M.
    Muller, David Eric
    Sridharan, Kumar
    Fetherston, R. Paul
    Tran, Ngoc C.
    Conrad, John R.
    Publisher
    American Institute of Physics
    Metadata
    Show full item record
    Permanent Link
    http://digital.library.wisc.edu/1793/11230
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    • College of Engineering Publications

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