Distribution of Incident Ions and Retained Dose Analysis for a Wedge-Shaped Target in Plasma Source Ion-Implantation

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Date
1995
Author
Malik, Shamim M.
Muller, David Eric
Sridharan, Kumar
Fetherston, R. Paul
Tran, Ngoc C.
Conrad, John R.
Publisher
American Institute of Physics
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Permanent Link
http://digital.library.wisc.edu/1793/11230
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