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Absolute densities of long lived species in an ionized physical vapor deposition copper-argon plasma

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dc.contributor.author Andrew, Yasmin en_US
dc.contributor.author Abraham, Ion C. en_US
dc.contributor.author Booske, John H. en_US
dc.contributor.author Lu, Zhi-Cherng en_US
dc.contributor.author Wendt, Amy E. en_US
dc.date.accessioned 2007-07-13T19:31:56Z
dc.date.available 2007-07-13T19:31:56Z
dc.date.issued 2000 en_US
dc.identifier.citation The following article appeared in Andrew, Y., Abraham, I., Booske, J.H., Lu, Z.C., & Wendt, A.E. (2000). Absolute Densities Of Long Lived Species In An Ionized Physical Vapor Deposition Copper Argon Plasma. Journal Of Applied Physics, 88(6), 3208-3219. and may be found at http://link.aip.org/link/?jap/88/3208 en_US
dc.identifier.uri http://digital.library.wisc.edu/1793/10924
dc.description This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. en_US
dc.description.provenance Made available in DSpace on 2007-07-13T19:31:56Z (GMT). No. of bitstreams: 1 file_1.pdf: 239288 bytes, checksum: ee93120008e76841987d566130e8f419 (MD5) Previous issue date: 2000 en
dc.format.extent 239288 bytes
dc.format.mimetype application/pdf en_US
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dc.publisher American Institute of Physics Inc en_US
dc.relation.ispartof http://www.aip.org en_US
dc.relation.ispartof http://jap.aip.org en_US
dc.rights Copyright 2000 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. en_US
dc.title Absolute densities of long lived species in an ionized physical vapor deposition copper-argon plasma en_US
dc.identifier.doi http://dx.doi.org/10.1063/1.1289219 en_US

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