Plasma source ion-implantation technique for surface modification of materials
Conrad, John R.
Radtke, Jeffrey L.
Dodd, Richard A.
Worzala, Frank J.
Tran, Ngoc C.
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The following article appeared in Conrad, J.R., Radtke, J.L., Dodd, R.A., Worzala, F.J., & Tran, N.C. (1987). Plasma Source Ion Implantation Technique For Surface Modification Of Materials. Journal Of Applied Physics, 62(11), 4591-6. and may be found at http://link.aip.org/link/?jap/62/4591