Thin-oxide charging damage to microelectronic test structures in an electron-cyclotron-resonance plasma
Friedmann, James B.
Shohet, J. Leon
McVittie, James P.
American Institute of Physics
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The following article appeared in Friedmann, J.B., Shohet, J.L., McVittie, J.P., & Ma, S.M. (1995). Thin Oxide Charging Damage To Microelectronic Test Structures In An Electron Cyclotron Resonance Plasma. Applied Physics Letters, 67(25), 3718-20. and may be found at http://link.aip.org/link/?apl/67/3718