Gridless ionized metal flux fraction measurement tool for use in ionized physical vapor deposition studies
Snodgrass, Thomas G.
Booske, John H.
Wendt, Amy E.
Shohet, J. Leon
American Institute of Physics Inc
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The following article appeared in Snodgrass, T.G., Booske, J.H., Wang, W., Wendt, A.E., & Shohet, J.L. (1999). Gridless Ionized Metal Flux Fraction Measurement Tool For Use In Ionized Physical Vapor Deposition Studies. Review Of Scientific Instruments, 70(2), 1525-1529. and may be found at http://link.aip.org/link/?rsi/70/1525