Surface potential measurements of vacuum ultraviolet irradiated Al2O3, Si3N4, and SiO2
Lauer, Jason L.
Shohet, J. Leon
Institute of Electrical and Electronics Engineers Inc., Piscataway, NJ 08855-1331, United States
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Lauer, J.L., & Shohet, J.L. (2005). Surface Potential Measurements Of Vacuum Ultraviolet Irradiated Al2 O3, Si3 N4, And Si O2. Ieee Transactions On Plasma Science, 33(2 I), 248-249.