Three-dimensional atom mapping of dopants in Si nanostructures
Booske, John H.
Larson, David J.
Kelly, Thomas F.
American Institute of Physics
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The following article appeared in Thompson, K., Booske, J.H., Larson, D.J., & Kelly, T.F. (2005). Three Dimensional Atom Mapping Of Dopants In Si Nanostructures. Applied Physics Letters, 87(5), -052108. and may be found at http://link.aip.org/link/?apl/87/