Recoil implantation method for ultrashallow p+/n junction formation
Liu, Henley L.
Gearhart, Steven S.
Booske, John H.
Cooper, Reid F.
American Institute of Physics
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The following article appeared in Liu, H.L., Gearhart, S.S., Booske, J.H., & Cooper, R.F. (2000). Recoil Implantation Method For Ultrashallow P+/N Junction Formation. Journal Of Applied Physics, 87(4), 1957-62. and may be found at http://link.aip.org/link/?jap/87/1957