Electromagnetic annealing for the 100 nm technology node
Booske, John H.
Gianchandani, Yogesh B.
Cooper, Reid F.
Institute of Electrical and Electronics Engineers Inc
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Thompson, K., Booske, J.H., Gianchandani, Y.B., & Cooper, R.F. (2002). Electromagnetic Annealing For The 100 Nm Technology Node. Ieee Electron Device Letters, 23(3), 127-129.