Electromagnetic fast firing for ultrashallow junction formation
Booske, John H.
Cooper, Reid F.
Gianchandani, Yogesh B.
Institute of Electrical and Electronics Engineers Inc
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Thompson, K., Booske, J. H., Cooper, R. F., & Gianchandani, Y. B. (2003). Electromagnetic Fast Firing For Ultrashallow Junction Formation. Ieee Transactions On Semiconductor Manufacturing, 16(3), 460-468.