Sputtering yield measurements during low energy xenon plasma bombardment
Doerner, Russell P.
Whyte, Dennis G.
Goebel, Dan M.
American Institute of Physics
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The following article appeared in Doerner, R.P., Whyte, D.G., & Goebel, D.M. (2003). Sputtering Yield Measurements During Low Energy Xenon Plasma Bombardment. Journal Of Applied Physics, 93(9), 5816-5823. and may be found at http://link.aip.org/link/?jap/93/5816