Browsing by Author "Mau, Robert"
Now showing items 1-2 of 2
-
Plasma properties determined with induction loop probes in a planar inductively coupled plasma source
Meyer, J.A.; Mau, Robert; Wendt, Amy E. (American Institute of Physics, 1996) -
Plasma-parameter dependence of thin-oxide damage from wafer charging during electron-cyclotron-resonance plasma processing
Friedmann, James B.; Shohet, J. Leon; Mau, Robert; Hershkowitz, Noah; Bisgaard, Soren; Ma, Shawming; McVittie, James P. (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 1997)