Browsing by Author "Yang, Xiaomin"
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Exposure of 38 nm period grating patterns with extreme ultraviolet interferometric lithography
Solak, Harun H.; He, Dongxing; Li, Weimin; Singh-Gasson, Sangeet; Cerrina, Francesco; Sohn, Byeong-Hyeok; Yang, Xiaomin; Nealey, Paul F. (American Institute of Physics Inc, 1999)