Browsing by Author "Wang, Shiang-Bau"
Now showing items 1-2 of 2
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Control of ion energy distribution at substrates during plasma processing
Wang, Shiang-Bau; Wendt, Amy E. (American Institute of Physics, 2000) -
Sheath thickness evaluation for collisionless or weakly collisional bounded plasmas
Wang, Shiang-Bau; Wendt, Amy E. (Institute of Electrical and Electronics Engineers Inc., Piscataway, NJ, USA, 1999)