Browsing by Author "Ilinski, Peter"
Now showing items 2-2 of 2
-
X-ray microdiffraction study of Cu interconnects
Zhang, Xueyuan; Solak, Harun H.; Cerrina, Francesco; Lai, Barry; Cai, Zhonghou; Ilinski, Peter; Legnini, Daniel G.; Rodrigues, William (American Institute of Physics Inc, 2000)