Browsing by Author "Breun, Robert A."
Now showing items 4-10 of 10
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Diagnostics for plasma processing (etching plasmas)
Hershkowitz, Noah; Breun, Robert A. (American Institute of Physics, 1997) -
Does high density-low pressure etching depend on the type of plasma source?
Breun, Robert A.; Quick, Anthony K.; Meyer, John; Chen, Robert Tseng Shiung; Hershkowitz, Noah; Ding, Ji (American Institute of Physics, 1996) -
An improved capacitive divider probe for plasma potential measurements in the Phaedrus tokamak
Wang, En Yao; Diebold, Daniel A.; Nonn, Paul D.; Pew, James; Li, W.Q.; Probert, Paul H.; Breun, Robert A.; Majeski, Richard P.; Yan, Shiluo; Hershkowitz, Noah (1991) -
Laser-Induced Fluorescence Measurement of the Dynamics of a Pulsed Planar Sheath
Goeckner, Matthew J.; Malik, Shamim M.; Conrad, John R.; Breun, Robert A. (American Institute of Physics, 1994) -
Measurement of Ion Species Ratio in the Plasma Source Ion-Implantation Process
Tang, Benyang; Fetherston, R. Paul; Shamim, Mansoora; Breun, Robert A.; Chen, An; Conrad, John R. (American Institute of Physics, 1993) -
Measurements on rotating ion cyclotron range of frequencies induced particle fluxes in axisymmetric mirror plasmas
Hatakeyama, Rikizo; Hershkowitz, Noah; Majeski, Richard P.; Wen, Y.J.; Brouchous, David A.; Probert, Paul H.; Breun, Robert A.; Roberts, D.; Vukovic, Mirko; Tanaka, Tak (American Institute of Physics, 1997) -
Whistler-mode electron cyclotron emission from the Phaedrus-B end cell
Cui, Binsheng; Probert, Paul H.; Brooker, Peter D.; Nonn, Paul D.; Keil, Douglas L.; Hershkowitz, Noah; Majeski, Richard P.; Breun, Robert A.; Ellis, Richard F. (1989)