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Nonlocal electron kinetics in a low-pressure inductively coupled radio-frequency discharge

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Author(s)
Kolobov, Vladimir I.; Beale, Daniel Frederick; Mahoney, Leonard J.; Wendt, Amy E.
Citation
The following article appeared in Kolobov, V.I., Beale, D.F., Mahoney, L.J., & Wendt, A.E. (1994). Nonlocal Electron Kinetics In A Low Pressure Inductively Coupled Radio Frequency Discharge. Applied Physics Letters, 65(5), 537-9. and may be found at http://link.aip.org/link/?apl/65/537
Date
1994
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http://www.aip.org; http://apl.aip.org/
Description
This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
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