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Electron-density and energy distributions in a planar inductively coupled discharge

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Author(s)
Mahoney, Leonard J.; Wendt, Amy E.; Barrios, Ernesto; Richards, Carolyn J.; Shohet, J. Leon
Citation
The following article appeared in Mahoney, L.J., Wendt, A.E., Barrios, E., Richards, C.J., & Shohet, J.L. (1994). Electron Density And Energy Distributions In A Planar Inductively Coupled Discharge. Journal Of Applied Physics, 76(4), 2041-7. and may be found at http://link.aip.org/link/?jap/76/2041
Date
1994
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http://www.aip.org; http://jap.aip.org
Description
This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
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