Browsing by Author "Wendt, Amy E."
Now showing items 11-15 of 15
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Passive external radio frequency filter for Langmuir probes
Wendt, Amy E. (American Institute of Physics, 2001) -
Plasma properties determined with induction loop probes in a planar inductively coupled plasma source
Meyer, J.A.; Mau, Robert; Wendt, Amy E. (American Institute of Physics, 1996) -
An rf sustained argon and copper plasma for ionized physical vapor deposition of copper
Wang, Weitung; Foster, John; Snodgrass, Thomas G.; Wendt, Amy E.; Booske, John H. (American Institute of Physics Inc, 1999) -
Sheath thickness evaluation for collisionless or weakly collisional bounded plasmas
Wang, Shiang-Bau; Wendt, Amy E. (Institute of Electrical and Electronics Engineers Inc., Piscataway, NJ, USA, 1999) -
Striations in a radio frequency planar inductively coupled plasma
Stittsworth, Jessica A.; Wendt, Amy E. (IEEE, Piscataway, NJ, USA, 1996)