Browsing by Author "Vladimirsky, Yuli"
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Measurement of strain in Al-Cu interconnect lines with x-ray microdiffraction
Solak, Harun H.; Vladimirsky, Yuli; Cerrina, Francesco; Lai, Barry; Yun, Wenbing; Cai, Zhonghou; Ilinski, Peter; Legnini, Daniel G.; Rodrigues, William (American Institute of Physics Inc, 1999)