Browsing by Author "Onuoha, Tina"
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Magnetic-field-enhanced rf argon plasma for ionized sputtering of copper
Wang, Weitung; Foster, John; Wendt, Amy E.; Booske, John H.; Onuoha, Tina; Sandstrom, Perry W.; Liu, Henley L.; Gearhart, Steven S.; Hershkowitz, Noah (American Institute of Physics, 1997)